Measurement of Transparent Film Using Vertical Scanning White-Light Interferometry
نویسندگان
چکیده
منابع مشابه
Fringe modulation skewing effect in white-light vertical scanning interferometry.
An interference fringe modulation skewing effect in white-light vertical scanning interferometry that can produce a batwings artifact in a step height measurement is described. The skewing occurs at a position on or close to the edge of a step in the sample under measurement when the step height is less than the coherence length of the light source used. A diffraction model is used to explain t...
متن کاملSurface and thickness measurement of a transparent film using wavelength scanning interferometry.
A wavelength scanning interferometer for measuring the surface and thickness of a transparent film has been studied. A halogen light source combined with an acousto-optic tuneable filter is used to generate a sequence of filtered light in a Linnik interferometer, which leads to a sequence of interferograms captured by a CCD camera. When a transparent thin film is measured, the reflection signal...
متن کاملStep-Height Measurement of Surface Functionalized Micromachined Microcantilever Using Scanning White Light Interferometry.
Micro-cantilever arrays with different dimensions are fabricated by micromachining technique onto silicon <1 0 0> substrate. These sputtered Gold-Coated micro-cantilevers were later surface functionalized. Scanning Electron Microscopy, Atomic Force Microscopy and Optical SWLI using LASER probe are employed to characterize the morphology and image measurement of the micro-cantilever arrays, resp...
متن کاملFundamental aspects of resolution and precision in vertical scanning white-light interferometry
Wediscuss the height and lateral resolution that can be achieved in vertical scanningwhite-light interferometry (SWLI).With respect to interferometric height resolution, phase-shifting interferometry (PSI) is assumed to provide the highest accuracy. However, if the noise dependence of SWLI phase evaluation and PSI algorithms is considered, SWLImeasurements can be shown to bemore precise.With re...
متن کاملImproved vertical-scanning interferometry.
We describe a method that combines phase-shifting and coherence-peak-sensing techniques to permit measurements with the height resolution of phase-shifting interferometry without the interval-slope limitation of lambda/4 per data sample of phase-shifting interferometry. A five-frame algorithm is used to determine both the best-focus frame position and the fractional phase from the best-focus fr...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2006
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/48/1/198